Energy Conversion and Flow Characteristics of Argon Inductively Coupled Plasma Heater
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摘要: 对感应耦合等离子（inductively coupled plasma，ICP）加热器内能量转化过程与分布规律、流动特性的研究和认识能够为高频等离子加热器的设计提供理论指导，同时能够为加热器向大功率、多介质、广适用方向的发展提供支撑. 基于二维轴对称、层流流动和局部热力学平衡等假设条件，利用COMSOL对百千瓦级Ar介质柱状ICP加热器进行了磁场、流体传热和层流3个物理场的耦合计算，得到等离子加热器内的温度场、能量分布和流场，并对能量转化、热量传递和流动过程进行了分析. 同时，通过与光谱法测量得到温度进行对比，数值模拟模型建立的合理性得到验证. 研究结果发现：由于趋肤效应，高频感应耦合等离子加热器内最高温度区域对称分布在感应线圈覆盖区距外石英管一定距离处，中心区域温度略低. 加热器下游中心及出口一定范围内为高温区且温度均匀，之后向两侧温度不断降低.加热器内气流高速区在最底匝线圈及其下游的中心区域，加热器上部存在回流区.
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关键词:
- 感应耦合等离子加热器 /
- 数值模拟 /
- 能量转化 /
- 温度 /
- 速度
Abstract: The research on the energy conversion process, distribution and flow characteristics in the inductively coupled plasma(ICP) heater is helpful to provide theoretical guidance for the design of ICP heater and support its development with high-power, multi working gas and more applications. In this paper, the coupling calculation of magnetic field, fluid heat transfer and laminar flow field of argon cylindrical ICP torch was carried out by using COMSOL based on the assumptions of two-dimensional axisymmetric geometry, laminar flow and local thermodynamic equilibrium in the heater. The temperature field, energy distribution and flow field in the heater were obtained. The process of energy conversion, heat transfer and gas flow were analyzed. At the same time, the rationality of the numerical simulation was verified by comparing with the temperature measured by spectrum method. The results show that the highest temperature zone in the torch is symmetrically distributed in the area covered by the coil and there is a certain distance from the outer quartz tube, which is caused by skin effect. The temperature in the center of this area is slightly lower. At the outlet of the heater, the temperature is high and uniform in a certain range of the center and decreases to both sides. The high velocity zone of gas flow is located in the center of the torch corresponding to the bottom coil and its downstream region. A recirculation zone is generated in the upper part of the plasma torch.-
Key words:
- inductively coupled plasma heater /
- numerical simulation /
- energy conversion /
- temperature /
- velocity
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图 1 感应耦合等离子加热器几何结构及网格划分
Figure 1. Geometric construction and computational mesh of the ICP heater
图 3 感应耦合等离子加热器内Joule热及电导率分布
Figure 3. Distribution of Joule heat and conductivity in the ICP heater
图 4 感应耦合等离子加热器内不同横截面上的温度分布曲线
Figure 4. Temperature distribution at different cross sections in the ICP heater
图 5 感应耦合等离子加热器内径线上温度分布(z=-143.5 mm)
Figure 5. Temperature distribution along the radial direction in the ICP heater(z=-143.5 mm)
图 7 感应耦合等离子加热器内轴心线上轴向速度(vz)分布
Figure 7. Distribution of axial velocity(vz) along the axis in the ICP heater
表 1 模型结构特征尺寸
Table 1. Size of geometric features
R1/mm R2/mm R3/mm Rc/mm d1/mm d2/mm d3/mm Dc/mm Sc/mm L1/mm Lc/mm L0/mm 2 21 26.5 45 5 2 3.5 11 20 73.5 93.5 250 
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